Design and fabrication of a novel MEMS thermoelectric generator
نویسندگان
چکیده
منابع مشابه
Design and Fabrication of a Mems Thermoelectric Generator for Energy Harvesting
This paper presents a technology platform to fabricate micro thermoelectric generators (μTEG) with thin-film thermopiles. The combination of bulk and surface micromachining processes allows the integration of in-plane thin-film thermopiles in a device with a cross-plane heat flux. Heat flux guiding structures are used to maximize the temperature difference across the thermopiles. FEM simulation...
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2011
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2011.12.051